The microscopic characteristics of a functional fluid for a micro polishing process were investigated by microscopic observation and micro particle image velocimetry. This functional fluid, which consists of suspended micro scale diamond particles in insulated silicon oil, has two specific flow structures under a high-voltage alternating electric field. One flow structure consists of a reciprocating flow generated in one direction between the electrodes under low-electric-field and high-frequency conditions. The other flow structure consists of a rotational flow formed under high-electric-field and low-frequency conditions. These specific flow structures contribute actively to a polishing process and to the development of micro fluidic devices in the future. In the present study, the effect of the electric field on specific flow structures and the mechanism of the induced flow are clarified.
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ASME/JSME 2007 5th Joint Fluids Engineering Conference
July 30–August 2, 2007
San Diego, California, USA
Conference Sponsors:
- Fluids Engineering Division
ISBN:
0-7918-4288-6
PROCEEDINGS PAPER
Microscopic Characteristics of Functional Fluid Suspended Diamond Particles Under the High-Voltage Alternating Electric Field
Hiromichi Obara,
Hiromichi Obara
Tokyo Metropolitan University, Hachioji, Tokyo, Japan
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Ryousuke Ibata,
Ryousuke Ibata
Tokyo Metropolitan University, Hachioji, Tokyo, Japan
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Yusuke Kawai,
Yusuke Kawai
Tokyo Metropolitan University, Hachioji, Tokyo, Japan
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Yasuaki Matsudair
Yasuaki Matsudair
Tokyo Metropolitan University, Hachioji, Tokyo, Japan
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Hiromichi Obara
Tokyo Metropolitan University, Hachioji, Tokyo, Japan
Ryousuke Ibata
Tokyo Metropolitan University, Hachioji, Tokyo, Japan
Yusuke Kawai
Tokyo Metropolitan University, Hachioji, Tokyo, Japan
Yasuaki Matsudair
Tokyo Metropolitan University, Hachioji, Tokyo, Japan
Paper No:
FEDSM2007-37191, pp. 1637-1640; 4 pages
Published Online:
March 30, 2009
Citation
Obara, H, Ibata, R, Kawai, Y, & Matsudair, Y. "Microscopic Characteristics of Functional Fluid Suspended Diamond Particles Under the High-Voltage Alternating Electric Field." Proceedings of the ASME/JSME 2007 5th Joint Fluids Engineering Conference. Volume 1: Symposia, Parts A and B. San Diego, California, USA. July 30–August 2, 2007. pp. 1637-1640. ASME. https://doi.org/10.1115/FEDSM2007-37191
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