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Keywords: Particle Removal
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Proceedings Papers

Proc. ASME. FEDSM2010, ASME 2010 3rd Joint US-European Fluids Engineering Summer Meeting: Volume 1, Symposia – Parts A, B, and C, 43-50, August 1–5, 2010
Paper No: FEDSM-ICNMM2010-30069
... was also included. The predictions of the electric detachment fields for particles were compared with the available experimental data and good agreement was observed. Particle Adhesion Particle Removal Electrostatic Force Capillary Force Surface Tension Resuspension Elastic Deformation Plastic...
Proceedings Papers

Proc. ASME. FEDSM2009, Volume 1: Symposia, Parts A, B and C, 667-673, August 2–6, 2009
Paper No: FEDSM2009-78253
... the electrostatic forces only have major effects on large particles. The model predictions were compared with the available experimental data and good agreement was observed. Particle Adhesion Particle Removal Electrostatic Force: Capillary Force Resuspension Elastic Deformation Plastic Deformation 1...
Proceedings Papers

Proc. ASME. FEDSM2007, Volume 1: Symposia, Parts A and B, 499-506, July 30–August 2, 2007
Paper No: FEDSM2007-37129
... microscope. Mechanism of this resist stripping process is discussed. Semiconductor Manufacturing Droplet Resist Stripping Particle Removal Cavitation Erosion Proceedings of FEDSM2007 5th Joint ASME/JSME Fluids Engineering Conference July 30-August 2, 2007 San Diego, California USA FEDSM2007...