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Keywords: Semiconductor ManufacturingClose
Proc. ASME. FEDSM2007, Volume 1: Symposia, Parts A and B, 499-506, July 30–August 2, 2007
Paper No: FEDSM2007-37129
... of semiconductor manufacturing but also in maintaining chemical-free environment. Both droplet velocity and diameter distributions were measured by Phase Doppler Anemometer (PDA). Resist stripping was observed with a high-speed video camera and the fringes of the removed resist region were observed with a digital...