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Keywords: passive planar valveClose
Proc. ASME. FEDSM2009, Volume 2: Fora, 457-462, August 2–6, 2009
Paper No: FEDSM2009-78250
... that the valve efficiency depended on the mass inertia of the moving part, excitation frequency, and voltage. The present results are useful for the optimum design of this planar passive valve to improve the pumping efficiency. Keywords: PZT micropump, passive planar valve, flow measurement, micro-PIV, linear...