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Keywords: photolithography
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Proceedings Papers

Proc. ASME. FEDSM2021, Volume 3: Fluid Mechanics; Micro and Nano Fluid Dynamics; Multiphase Flow, V003T07A003, August 10–12, 2021
Paper No: FEDSM2021-65209
...Abstract Abstract Deformation of each cell, as it passes through the micro-slit in the flow channel, has been investigated in vitro. A slit with a rectangular cross section (height 10 μm, width 0.4 mm, length 0.1 mm) was made in the center of the flow path by photolithography technique...
Proceedings Papers

Proc. ASME. FEDSM2020, Volume 3: Computational Fluid Dynamics; Micro and Nano Fluid Dynamics, V003T06A004, July 13–15, 2020
Paper No: FEDSM2020-20073
...Abstract Abstract A micro-slit has been designed to measure deformation of a biological single cell passing through the slit. At the middle part of the flow channel, the slit (7 μm height, 0.4 mm width, and 0.1 mm length) has been made by photolithography technique: the combination of the micro...