A two-dimensional numerical model has been developed to investigate the induction electromagnetic (EM) field and the thermo-fluid field in a radio frequency inductively coupled plasma (RF-ICP). Various physical and chemical phenomena have been considered such as the induction heating, plasma generation, and the in-flight particle interaction with the plasma jet. This model has been applied to the induction plasma spray process operated in a vacuum chamber. The partially stabilized zirconia powder (PSZ) has been used as an example for the feedstock. The effects of power input, standoff distance and powder injection position on the plasma and particle behaviors have also been investigated and discussed.

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