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Proceedings Papers

A Triangular Frequency-Tuning Comb Array

Ki Bang Lee, Young-Ho Cho

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 127-131, November 16–21, 1997

Paper No: IMECE1997-0950

DOI: https://doi.org/10.1115/IMECE1997-0950

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Topics: Damping, Manufacturing, Microfabrication, Micromachining, Micromechanical resonators, Pressure, Resonance, Shapes

Proceedings Papers

Micromachined RF Signal Switching Devices on High Resistivity Silicon Substrates

Zhimin J. Yao, Chuck Goldsmith, Susan Eshelman, David Denniston

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 69-73, November 16–21, 1997

Paper No: IMECE1997-0941

DOI: https://doi.org/10.1115/IMECE1997-0941

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Topics: Cantilevers, Design, Electrical resistivity, Manufacturing, Membranes, Metals, Micromachining, Microwaves, Signals, Silicon

Proceedings Papers

Microactuators Based on Electrothermal Expansion of Clamped-Clamped Beams

Mu Chiao, Liwei Lin

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 75-80, November 16–21, 1997

Paper No: IMECE1997-0942

DOI: https://doi.org/10.1115/IMECE1997-0942

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Topics: Microactuators, Microbeams, Computers, Displacement, Image processing, Micromachining, Polysilicon, Thermoelasticity

Proceedings Papers

MEMS for Fluidic Controls

Chih-Ming Ho, Yu-Chong Tai

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 27, November 16–21, 1997

Paper No: IMECE1997-0934

DOI: https://doi.org/10.1115/IMECE1997-0934

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Topics: Microelectromechanical systems, Sensors, Actuators, Circuits, Shear stress, Transducers, Computers, Integrated circuit fabrication, Micromachining, Artificial neural networks

Proceedings Papers

A Lateral Repulsive-Force Drive Using Asymmetric Electrostatic Field

Ki Bang Lee, Young-Ho Cho

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 81-85, November 16–21, 1997

Paper No: IMECE1997-0943

DOI: https://doi.org/10.1115/IMECE1997-0943

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Topics: Atmospheric pressure, Displacement, Electric fields, Electrodes, Electromagnetic induction, Finite element analysis, Microactuators, Micromachining, Polysilicon, Resonance

Proceedings Papers

Characterization of Thin-Film Impact Microactuators

Roger L. Hipwell, Richard S. Muller, Albert P. Pisano

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 87-91, November 16–21, 1997

Paper No: IMECE1997-0944

DOI: https://doi.org/10.1115/IMECE1997-0944

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Topics: Microactuators, Thin films, Actuators, Design, Displacement, Impulse (Physics), Micromachining, Microscale devices, Momentum

Proceedings Papers

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

C. H. Liu, J. K. Reynolds, A. Partridge, J. D. Grade, A. M. Barzilai, T. W. Kenny, H. K. Rockstad

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 13-20, November 16–21, 1997

Paper No: IMECE1997-0932

DOI: https://doi.org/10.1115/IMECE1997-0932

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Topics: Accelerometers, Electrons, Micromachining, Transducers, Tunnel construction, Resonance, Silicon, Acoustics, Design, Manufacturing

Proceedings Papers

Strength and Fracture of Micromachined Silicon Structures

Wan Suwito, Martin L. Dunn, Shawn J. Cunningham

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 99-104, November 16–21, 1997

Paper No: IMECE1997-0946

DOI: https://doi.org/10.1115/IMECE1997-0946

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Topics: Fracture (Materials), Fracture (Process), Micromachining, Silicon, Corners (Structural elements), Design, Anisotropy, Chemical etching, Crystals, Manufacturing

Proceedings Papers

Design, Fabrication and Static Test of a Resonant Microaccelerometer

Si Young Kim, Jeung Sang Go, Young-Ho Cho

Proc. ASME. IMECE97, Microelectromechanical Systems (MEMS), 21-26, November 16–21, 1997

Paper No: IMECE1997-0933

DOI: https://doi.org/10.1115/IMECE1997-0933

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Topics: Design, Manufacturing, Resonance, Accelerometers, Micromachining, Polysilicon, Stress, Annealing, Deflection, Mechanical structures

Proceedings Papers

The Present and Future of Micromachining in Industrial Production of Surgical Tools

M. J. Tolkoff

Proc. ASME. IMECE97, Advances in Bioengineering, 289, November 16–21, 1997

Paper No: IMECE1997-0342

DOI: https://doi.org/10.1115/IMECE1997-0342

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Topics: Micromachining, Surgical tools, Biological tissues, Engineers, Maintenance, Valves, Biology, Blood vessels, Bridges (Structures), Carbon dioxide

Proceedings Papers

A Micromachined Device to Measure Subcellular Traction Forces

Catherine G. Galbraith, Michael P. Sheetz

Proc. ASME. IMECE97, Advances in Bioengineering, 167-168, November 16–21, 1997

Paper No: IMECE1997-0281

DOI: https://doi.org/10.1115/IMECE1997-0281

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Topics: Micromachining, Traction, Adhesion, Tissue engineering

Proceedings Papers

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Sumit Majumder, N. E. McGruer, Paul M. Zavracky, Richard H. Morrison, George G. Adams, Jacqueline Krim

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 341-346, November 15–20, 1998

Paper No: IMECE1998-1265

DOI: https://doi.org/10.1115/IMECE1998-1265

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Topics: Contact resistance, Modeling, Switches, Gates (Closures), Cantilever beams, Coating processes, Coatings, Currents, Cycles, Electrodes

Proceedings Papers

Laser Zone Texturing of Magnetic Disk Substrates

Hee K. Park, Pieter J. M. Kerstens

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 19-25, November 15–20, 1998

Paper No: IMECE1998-1218

DOI: https://doi.org/10.1115/IMECE1998-1218

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Topics: Disks, Lasers, Manufacturing, Micromachining, Physics, Process design, Tooling

Proceedings Papers

Stand Alone Micro Liquid Dosing System

R. Roßberg, H. Sandmaier, S. Büttgenbach

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 179-186, November 15–20, 1998

Paper No: IMECE1998-1240

DOI: https://doi.org/10.1115/IMECE1998-1240

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Topics: Actuators, Batteries, Control systems, Electronics, Flow (Dynamics), Micromachining, Polishing equipment, Pressure, Reservoirs, Resonance

Proceedings Papers

Cyclic Fatigue Testing of Surface-Micromachined Thermal Actuators

Robert A. Conant, Richard S. Muller

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 273-277, November 15–20, 1998

Paper No: IMECE1998-1254

DOI: https://doi.org/10.1115/IMECE1998-1254

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Topics: Actuators, Fatigue testing, Micromachining, Cycles, Deformation, Displacement, Failure, High temperature, Microelectromechanical systems, Temperature

Proceedings Papers

A Smart Shape Memory Alloy Actuated Microvalve With Feedback Control

Krishnan Nandakumar, Allen G. Parr, Geon Hahm, Michael A. Huff, Stephen M. Phillips

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 139-143, November 15–20, 1998

Paper No: IMECE1998-1234

DOI: https://doi.org/10.1115/IMECE1998-1234

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Topics: Feedback, Shape memory alloys, Valves, Flow (Dynamics), Flow sensors, Micromachining, Air flow, Control equipment, Electronics, Fluids

Proceedings Papers

Analysis on Multi-Layered, Corrugated Diaphragm With Residual Stress

Hai Yan, Kuok Chun Lou, Byungchai Lee, Eun Sok Kim

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 373-378, November 15–20, 1998

Paper No: IMECE1998-1271

DOI: https://doi.org/10.1115/IMECE1998-1271

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Topics: Diaphragms (Mechanical devices), Diaphragms (Structural), Stress, Deflection, Pressure, Residual stresses, Stress concentration, Anisotropy, Design, Finite difference methods

Proceedings Papers

Thin Film Microresonator for Vacuum Sensing

F. Yuan, C. L. Tom, C. H. Mastrangelo, J. Martin, R. Pfenninger

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 241-246, November 15–20, 1998

Paper No: IMECE1998-1248

DOI: https://doi.org/10.1115/IMECE1998-1248

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Topics: Micromechanical resonators, Thin films, Vacuum, Semiconductor wafers, Silicon, Borosilicate glasses, Glass, Manufacturing, Micromachining, Pressure

Proceedings Papers

MEMS Micro-Valve Arrays for Fluidic Control

Donald E. Wroblewski, Mark Horenstein, Nelsimar Vandelli, Margo Velonis, Thomas Bifano

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 145-151, November 15–20, 1998

Paper No: IMECE1998-1235

DOI: https://doi.org/10.1115/IMECE1998-1235

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Topics: Microelectromechanical systems, Valves, Flow (Dynamics), Actuators, Microfluidics, Pressure, Silicon, Air flow, Deflection, Flow control

Proceedings Papers

Self-Assembled Microslider for Microjoinery

L.-S. Huang, B. Sridharan, C.-J. Kim, S. D. Collins, C. González, R. L. Smith

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 499-504, November 15–20, 1998

Paper No: IMECE1998-1291

DOI: https://doi.org/10.1115/IMECE1998-1291

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Topics: Self-assembly, Manufacturing, Semiconductor wafers, Bonding, Etching, Anisotropy, Clearances (Engineering), Friction, Micromachining, Polishing

2 3 4 5

NARROW

A Triangular Frequency-Tuning Comb Array

Micromachined RF Signal Switching Devices on High Resistivity Silicon Substrates

Microactuators Based on Electrothermal Expansion of Clamped-Clamped Beams

MEMS for Fluidic Controls

A Lateral Repulsive-Force Drive Using Asymmetric Electrostatic Field

Characterization of Thin-Film Impact Microactuators

A High-Sensitivity Micromachined Accelerometer Based on Electron Tunneling Transducers

Strength and Fracture of Micromachined Silicon Structures

Design, Fabrication and Static Test of a Resonant Microaccelerometer

The Present and Future of Micromachining in Industrial Production of Surgical Tools

A Micromachined Device to Measure Subcellular Traction Forces

Contact Resistance Modeling and Measurements of an Electrostatically Actuated Micromechanical Switch

Laser Zone Texturing of Magnetic Disk Substrates

Stand Alone Micro Liquid Dosing System

Cyclic Fatigue Testing of Surface-Micromachined Thermal Actuators

A Smart Shape Memory Alloy Actuated Microvalve With Feedback Control

Analysis on Multi-Layered, Corrugated Diaphragm With Residual Stress

Thin Film Microresonator for Vacuum Sensing

MEMS Micro-Valve Arrays for Fluidic Control

Self-Assembled Microslider for Microjoinery

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