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Keywords: micromachining
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Proceedings Papers

Proc. ASME. IMECE98, Dynamics, Acoustics and Simulations, 123-127, November 15–20, 1998
Paper No: IMECE1998-0557
...Abstract Abstract A new aluminum based valveless fluid micropump is designed by micromachining method. The pump consists of two fluid diffuser/nozzle elements on each side of a chamber with an oscillating diaphragm which is actuated with a piezoelectric disc. The two simultaneously vibrating...
Proceedings Papers

Proc. ASME. IMECE2001, Heat Transfer: Volume 6 — Heat Transfer in Materials Processing, 351-357, November 11–16, 2001
Paper No: IMECE2001/HTD-24368
... Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition November 11-16, 2001, New York, NY HTD-Vol. 369-6 IMECE2001 /HTD-24368 MICROMACHINING OF VIAS THROUGH THERMAL-SPRAYED MULTILAYER STRUCTURES USING ULTRAFAST LASERS J. Sun* C. H. Fan* and J. P. Longtin* Department...
Proceedings Papers

Proc. ASME. IMECE2000, Manufacturing Engineering, 947-949, November 5–10, 2000
Paper No: IMECE2000-1901
... in the micrometer scale must be patterned. ultra-violet (UV) Excimer laser micromachining for biomedical Conventional techniques can not deliver cost-effective solutions applications. In this work, Parametric investigations were conducted to produce micro-patterns on the polymer surface. Photolithography...
Proceedings Papers

Proc. ASME. IMECE2012, Volume 3: Design, Materials and Manufacturing, Parts A, B, and C, 2085-2090, November 9–15, 2012
Paper No: IMECE2012-89658
... The aim of this research is to investigate the effect of elastic recovery on the ability to precisely control depth of cut when micromachining channels in poly(methyl methacrylate) (PMMA). Both a standard and impact resistant PMMA were machined using an orthogonal micro-slitting arrangement...
Proceedings Papers

Proc. ASME. IMECE2007, Volume 3: Design and Manufacturing, 509-515, November 11–15, 2007
Paper No: IMECE2007-43848
... 26 05 2009 Compared with lithographic techniques, mechanical micromachining is a potential competitive process for fabricating 3D micro/meso components or macro parts with micro-features from diverse materials at high accuracy, efficiency, and low costs, but the size effect induced...
Proceedings Papers

Proc. ASME. IMECE2002, Microelectromechanical Systems, 195-200, November 17–22, 2002
Paper No: IMECE2002-33304
... 23 05 2008 A new magnetometer-accelerometer is developed with the silicon micromachining. The application areas include the cellular phones providing the third generation (3G) mobile service, and 3D game devices. The structure with a current-flowing conductor changes the vibration...
Proceedings Papers

Proc. ASME. IMECE2003, Microelectromechanical Systems, 97-100, November 15–21, 2003
Paper No: IMECE2003-41721
... 14 05 2008 This work describes a new post-CMOS (Complementary Metal Oxide Semiconductor) bulk micromachining process for fabrication of various microstructures. The important feature of the post-CMOS process is the use of wet etching without an addition mask, to form various...
Proceedings Papers

Proc. ASME. IMECE2004, Manufacturing Engineering and Materials Handling Engineering, 779-784, November 13–19, 2004
Paper No: IMECE2004-59248
..., continuum models predict that curled chips incorporate stresses due to the establishment of a secondary shear zone. A model is presented in terms of the heterogeneous aspects of continuous chip formation, which shows very good agreement with experimental data. Chip formation materials micromachining...
Proceedings Papers

Proc. ASME. IMECE2005, Microelectromechanical Systems, 151-156, November 5–11, 2005
Paper No: IMECE2005-81739
... 28 01 2008 The inherent residual stresses and strains from micro fabrication process can have profound effects on the functionality and reliability of MEMS devices. Surface micromachining fabrication involves a series of sequential steps of addition and subtraction of materials through...
Proceedings Papers

Proc. ASME. IMECE2005, Manufacturing Engineering and Materials Handling, Parts A and B, 965-969, November 5–11, 2005
Paper No: IMECE2005-81379
..., and appropriate mechanical response for use as sensors in surface force microscopy. injection molding microcantilevers micromachining biosensors bioMEMS Corbett J. , McKeown P. A. , Peggs G. N. , and Whatmore R. , 2000 , “ Nanotechnology: international development and emerging...