... Abstract A new aluminum based valveless fluid micropump is designed by micromachining method. The pump consists of two fluid diffuser/nozzle elements on each side of a chamber with an oscillating diaphragm which is actuated with a piezoelectric disc. The two simultaneously vibrating diaphragms...

... and modification of the multiplayer circuits is highly desired, which is difficult or impossible by using traditional manufacturing techniques. Laser ablation provides a practical alternative for precise micromachining of thermal-sprayed multilayer samples, especially using femtosecond lasers where materials can...

... Abstract Two polymer materials, PDLA and PVA, have been patterned by ultra-violet (UV) Excimer laser micromachining for biomedical applications. In this work, Parametric investigations were conducted for both PVA and PDLA polymers using a XeCl (Xenon-chloride) Excimer laser of 308 nm wavelength...

... The aim of this research is to investigate the effect of elastic recovery on the ability to precisely control depth of cut when micromachining channels in poly(methyl methacrylate) (PMMA). Both a standard and impact resistant PMMA were machined using an orthogonal micro-slitting arrangement...

... Compared with lithographic techniques, mechanical micromachining is a potential competitive process for fabricating 3D micro/meso components or macro parts with micro-features from diverse materials at high accuracy, efficiency, and low costs, but the size effect induced by the comparable size...

... A new magnetometer-accelerometer is developed with the silicon micromachining. The application areas include the cellular phones providing the third generation (3G) mobile service, and 3D game devices. The structure with a current-flowing conductor changes the vibration amplitude due...

... This work describes a new post-CMOS (Complementary Metal Oxide Semiconductor) bulk micromachining process for fabrication of various microstructures. The important feature of the post-CMOS process is the use of wet etching without an addition mask, to form various microstructures and deep...

... micromachining shear zones mechanics machining models nanoscale processing machined chip in orthogonal machining appears to be part of the p curl the cont due pres chip expe Key shea proc INTR mac prod hand unce and At the beginning of the cut, a transient tight curl is often Proceedings of IMECE04 2004...

..., and appropriate mechanical response for use as sensors in surface force microscopy. 31 01 2008 injection molding microcantilevers micromachining biosensors bioMEMS Corbett J. , McKeown P. A. , Peggs G. N. , and Whatmore R. , 2000 , “ Nanotechnology: international...

... The inherent residual stresses and strains from micro fabrication process can have profound effects on the functionality and reliability of MEMS devices. Surface micromachining fabrication involves a series of sequential steps of addition and subtraction of materials through deposition...