The delamination of thin coating films from substrates is a critical issue for the reliability of micro- and nanoelectronic devices. Indentation methods have the potential to measure interfacial strength in micro- and nanofilm thickness coating films. In this paper, indentation tests of layered structures are simulated using the damage-based cohesive zone model. When the delamination initiates, the indentation load and depth curve tend to deviate from the indentation load and depth curve for the perfectly bonded case. When the interface is stiffer than the coating film, a brittlelike delamination occurs on the interface; when the stiffness of the interface is smaller than that of the coating layer, a ductilelike delamination occurs on the interface. The ratio of shear moduli, , characterizes the delamination behavior on the interface during indentation tests. Focusing on the discontinuous point during the indentation tests and introducing the balance of energy before and after the onset of delamination, the evaluation method of the interfacial strength is proposed. The proposed method can be used to estimate the interfacial strength when the ratio of hardness and the yield stress of the coating film is .
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Evaluation of the Interfacial Strength of Layered Structures by Indentation Method
Masaki Omiya,
Masaki Omiya
Associate Professor
Department of Mechanical Engineering, Faculty of Science and Technology,
e-mail: oomiya@mech.keio.ac.jp
Keio University
, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama, Kanagawa 223-8522, Japan
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Kikuo Kishimoto,
Kikuo Kishimoto
Department of Mechanical and Sciences Engineering, Graduate School of Science and Engineering,
Tokyo Institute of Technology
, 2-12-1, O-okayama, Meguro-ku, Tokyo 152-8552, Japan
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Takashi Nakano
Takashi Nakano
Department of Mechanical and Sciences Engineering, Graduate School of Science and Engineering,
Tokyo Institute of Technology
, 2-12-1, O-okayama, Meguro-ku, Tokyo 152-8552, Japan
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Masaki Omiya
Associate Professor
Department of Mechanical Engineering, Faculty of Science and Technology,
Keio University
, 3-14-1, Hiyoshi, Kohoku-ku, Yokohama, Kanagawa 223-8522, Japane-mail: oomiya@mech.keio.ac.jp
Kikuo Kishimoto
Department of Mechanical and Sciences Engineering, Graduate School of Science and Engineering,
Tokyo Institute of Technology
, 2-12-1, O-okayama, Meguro-ku, Tokyo 152-8552, Japan
Takashi Nakano
Department of Mechanical and Sciences Engineering, Graduate School of Science and Engineering,
Tokyo Institute of Technology
, 2-12-1, O-okayama, Meguro-ku, Tokyo 152-8552, JapanJ. Appl. Mech. May 2008, 75(3): 031006 (6 pages)
Published Online: April 4, 2008
Article history
Received:
May 18, 2006
Revised:
August 30, 2007
Published:
April 4, 2008
Citation
Omiya, M., Kishimoto, K., and Nakano, T. (April 4, 2008). "Evaluation of the Interfacial Strength of Layered Structures by Indentation Method." ASME. J. Appl. Mech. May 2008; 75(3): 031006. https://doi.org/10.1115/1.2839890
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