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Keywords: nanoelectromechanical devices
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Journal Articles
Journal:
Journal of Applied Mechanics
Publisher: ASME
Article Type: Research Papers
J. Appl. Mech. May 2011, 78(3): 031014.
Published Online: February 16, 2011
... low modulus of elasticity leading to a material intrinsic length scale comparable to dimensions of microscale devices. beams finite element method nanotechnology surface elasticity beams (structures) deformation elasticity finite element analysis nanoelectromechanical devices...