This paper deals with the study of a model of self-sustained electrostatic microelectromechanical system (MEMS). The electrical part contains two nonlinear components: a nonlinear resistance with a negative slope in the current-voltage characteristics, and a capacitor, having a cubic form as the charge-voltage characteristics. The modal approximation and the finite differences numerical scheme are used to analyze the dynamical behavior of the system: Resonant oscillations and bifurcation diagram leading to chaos are observed for some values of the polarization voltage. Hints of applications of the device are given.
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