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Keywords: self-sustained electrostatic mems
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Comput. Nonlinear Dynam. April 2010, 5(2): 021010.
Published Online: February 19, 2010
... of this paper was to present a self-sustained electrostatic MEMS, in which self-sustained behavior originates from an electrical oscillator. After the modeling of the device, a nonlinear analysis of the system showed two resonant states and possibility of chaotic behaviors. The results from modal approach were...