Fiber aligned frequency domain thermoreflectance (FAFDTR) is a simple noncontact optical technique for accurately measuring the thermal conductivity of thin films and bulk samples for a wide range of materials, including electrically conducting samples. FAFDTR is a single-sided measurement that requires minimal sample preparation and no microfabrication. Like existing thermoreflectance techniques, a modulated pump laser heats the sample surface, and a probe laser monitors the resultant thermal wave via the temperature dependent reflectance of the surface. Via the use of inexpensive fiber coupled diode lasers and common mode rejection, FAFDTR addresses three challenges of existing optical methods: complexity in setup, uncertainty in pump-probe alignment, and noise in the probe laser. FAFDTR was validated for thermal conductivities spanning three orders of magnitude , and thin film thermal conductances greater than . Uncertainties of 10–15% were typical, and were dominated by uncertainties in the laser spot size. A parametric study of sensitivity for thin film samples shows that high thermal conductivity contrast between film and substrate is essential for making accurate measurements.
Issue Section:
Experimental Techniques
Keywords:
thermal conductivity,
thermal diffusivity,
thermometry,
photothermal,
thermoreflectance,
frequency domain,
photothermal effects,
thermal conductivity,
thermal conductivity measurement,
thermal diffusion,
thermoreflectance
Topics:
Fibers,
Thermal conductivity,
Thermoreflectance,
Thin films,
Pumps,
Temperature,
Probes,
Lasers,
Uncertainty
1.
Parker
, W. J.
, Jenkins
, R. J.
, Abbott
, G. L.
, and Butler
, C. P.
, 1961, “Flash Method of Determining Thermal Diffusivity, Heat Capacity, and Thermal Conductivity
,” J. Appl. Phys.
0021-8979, 32
(9
), pp. 1679
–1684
.2.
Paddock
, C. A.
, and Eesley
, G. L.
, 1986, “Transient Thermoreflectance From Thin Metal-Films
,” J. Appl. Phys.
0021-8979, 60
(1
), pp. 285
–290
.3.
Boccara
, A. C.
, Fournier
, D.
, and Badoz
, J.
, 1980, “Thermooptical Spectroscopy—Detection by the Mirage Effect
,” Appl. Phys. Lett.
0003-6951, 36
(2
), pp. 130
–132
.4.
Murphy
, J. C.
, and Aamodt
, L. C.
, 1980, “Photothermal Spectroscopy Using Optical Beam Probing—Mirage Effect
,” J. Appl. Phys.
0021-8979, 51
(9
), pp. 4580
–4588
.5.
Rosencwaig
, A.
, Opsal
, J.
, Smith
, W. L.
, and Willenborg
, D. L.
, 1985, “Detection of Thermal Waves Through Optical Reflectance
,” Appl. Phys. Lett.
0003-6951, 46
(11
), pp. 1013
–1015
.6.
Cahill
, D. G.
, 1990, “Thermal-Conductivity Measurement From 30-K to 750-K—The 3-Omega Method
,” Rev. Sci. Instrum.
0034-6748, 61
(2
), pp. 802
–808
.7.
Ohsone
, Y.
, Wu
, G.
, Dryden
, J.
, Zok
, F.
, and Majumdar
, A.
, 1999, “Optical Measurement of Thermal Contact Conductance Between Wafer-Like Thin Solid Samples
,” ASME J. Heat Transfer
0022-1481, 121
(4
), pp. 954
–963
.8.
Cahill
, D. G.
, Ford
, W. K.
, Goodson
, K. E.
, Mahan
, G. D.
, Majumdar
, A.
, Maris
, H. J.
, Merlin
, R.
, and Phillpot
, S. R.
, 2003, “Nanoscale Thermal Transport
,” J. Appl. Phys.
0021-8979, 93
(2
), pp. 793
–818
.9.
Anderson
, A. C.
, and Wolfe
, J. P.
, 1986, Phonon Scattering in Condensed Matter V: Proceedings of the Fifth International Conference
, Urbana, IL, Jun. 2–6, Springer-Verlag
, Berlin
.10.
Cahill
, D. G.
, 2004, “Analysis of Heat Flow in Layered Structures for Time-Domain Thermoreflectance
,” Rev. Sci. Instrum.
0034-6748, 75
(12
), pp. 5119
–5122
.11.
Cahill
, D. G.
, Goodson
, K.
, and Majumdar
, A.
, 2002, “Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures
,” ASME J. Heat Transfer
0022-1481, 124
(2
), pp. 223
–241
.12.
Käding
, O. W.
, Skurk
, H.
, and Goodson
, K. E.
, 1994, “Thermal Conduction in Metallized Silicon-Dioxide Layers on Silicon
,” Appl. Phys. Lett.
0003-6951, 65
(13
), pp. 1629
–1631
.13.
Kang
, K.
, Koh
, Y. K.
, Chiritescu
, C.
, Zheng
, X.
, and Cahill
, D. G.
, 2008, “Two-Tint Pump-Probe Measurements Using a Femtosecond Laser Oscillator and sharp-Edged Optical Filters
,” Rev. Sci. Instrum.
0034-6748, 79
(11
), p. 114901
.14.
Qiu
, T. Q.
, Juhasz
, T.
, Suarez
, C.
, Bron
, W. E.
, and Tien
, C. L.
, 1994, “Femtosecond Laser-Heating of Multilayer Metals. 2. Experiments
,” Int. J. Heat Mass Transfer
0017-9310, 37
(17
), pp. 2799
–2808
.15.
Thomsen
, C.
, Strait
, J.
, Vardeny
, Z.
, Maris
, H. J.
, Tauc
, J.
, and Hauser
, J. J.
, 1984, “Coherent Phonon Generation and Detection by Picosecond Light-Pulses
,” Phys. Rev. Lett.
0031-9007, 53
(10
), pp. 989
–992
.16.
Rantala
, J.
, Wei
, L. H.
, Kuo
, P. K.
, Jarrinen
, J.
, Luukkala
, M.
, and Thomas
, R. L.
, 1993, “Determination of Thermal-Diffusivity of Low-Diffusivity Materials Using the Mirage Method With Multiparameter Fitting
,” J. Appl. Phys.
0021-8979, 73
(6
), pp. 2714
–2723
.17.
Pottier
, L.
, 1994, “Micrometer Scale Visualization of Thermal Waves by Photoreflectance Microscopy
,” Appl. Phys. Lett.
0003-6951, 64
(13
), pp. 1618
–1619
.18.
Lepoutre
, F.
, Balageas
, D.
, Forge
, P.
, Hirschi
, S.
, Joulaud
, J. L.
, Rochais
, D.
, and Chen
, F. C.
, 1995, “Micron-Scale Thermal Characterizations of Interfaces Parallel or Perpendicular to the Surface
,” J. Appl. Phys.
0021-8979, 78
(4
), pp. 2208
–2223
.19.
Taketoshi
, N.
, Ozawa
, M.
, Ohta
, H.
, and Baba
, T.
, 1999, “Thermal Effusivity Distribution Measurements Using a Thermoreflectance Technique
,” Photoacoustic and Photothermal Phenomena: Tenth International Conference
, F.
Scudieri
and M.
Bertolotti
, eds., AIP
, New York
.20.
Hatori
, K.
, Taketoshi
, N.
, Baba
, T.
, and Ohta
, H.
, 2005, “Thermoreflectance Technique to Measure Thermal Effusivity Distribution With High Spatial Resolution
,” Rev. Sci. Instrum.
0034-6748, 76
(11
), pp. 114901
.21.
Schmidt
, A. J.
, Cheaito
, R.
, and Chiesa
, M.
, 2009, “A Frequency-Domain Thermoreflectance Method for the Characterization of Thermal Properties
,” Rev. Sci. Instrum.
0034-6748, 80
(9
), pp. 094901
.22.
Capinski
, W. S.
, and Maris
, H. J.
, 1996, “Improved Apparatus for Picosecond Pump-and-Probe Optical Measurements
,” Rev. Sci. Instrum.
0034-6748, 67
(8
), pp. 2720
–2726
.23.
Yarai
, A.
, and Nakanishi
, T.
, 2007, “Laptop Photothermal Reflectance Measurement Instrument Assembled With Optical Fiber Components
,” Rev. Sci. Instrum.
0034-6748, 78
(5
), p. 054903
.24.
Weaver
, J. H.
, Lynch
, D. W.
, Culp
, C. H.
, and Rosei
, R.
, 1976, “Thermoreflectance of V, Nb, and Paramagnetic Cr
,” Phys. Rev. B
0556-2805, 14
(2
), pp. 459
–463
.25.
Feldman
, A.
, 1999, “Algorithm for Solutions of the Thermal Diffusion Equation in a Stratified Medium With a Modulated Heating Source
,” High Temp. - High Press.
0018-1544, 31
(3
), pp. 293
–298
.26.
Incropera
, F. P.
, and DeWitt
, D. P.
, 1996, Fundamentals of Heat and Mass Transfer
, Wiley
, New York
.27.
Lee
, S. M.
, and Cahill
, D. G.
, 1997, “Heat Transport in Thin Dielectric Films
,” J. Appl. Phys.
0021-8979, 81
(6
), pp. 2590
–2595
.28.
Yamane
, T.
, Nagai
, N.
, Katayama
, S.
, and Todoki
, M.
, 2002, “Measurement of Thermal Conductivity of Silicon Dioxide Thin Films Using a 3 Omega Method
,” J. Appl. Phys.
0021-8979, 91
(12
), pp. 9772
–9776
.29.
Chien
, H. C.
, Yao
, D. J.
, Huang
, M. J.
, and Chang
, T. Y.
, 2008, “Thermal Conductivity Measurement and Interface Thermal Resistance Estimation Using SiO2 Thin Film
,” Rev. Sci. Instrum.
0034-6748, 79
(5
), pp. 054902
.30.
Bao
, Z. N.
, Feng
, Y.
, Dodabalapur
, A.
, Raju
, V. R.
, and Lovinger
, A. J.
, 1997, “High-Performance Plastic Transistors Fabricated by Printing Techniques
,” Chem. Mater.
0897-4756, 9
(6
), pp. 1299
.31.
Koh
, Y. K.
, Singer
, S. L.
, Kim
, W.
, Zide
, J. M. O.
, Lu
, H.
, Cahill
, D. G.
, Majumdar
, A.
, and Gossard
, A. C.
, 2009, “Comparison of the 3 Omega Method and Time-Domain Thermoreflectance for Measurements of the Cross-Plane Thermal Conductivity of Epitaxial Semiconductors
,” J. Appl. Phys.
0021-8979, 105
(5
), p. 054303
.32.
Cahill
, D. G.
, and Pohl
, R. O.
, 1987, “Thermal-Conductivity of Amorphous Solids Above the Plateau
,” Phys. Rev. B
0556-2805, 35
(8
), pp. 4067
–4073
.33.
Okuda
, T.
, Nakanishi
, K.
, Miyasaka
, S.
, and Tokura
, Y.
, 2001, “Large Thermoelectric Response of Metallic Perovskites: Sr1−xLaxTiO3 (0⇐x⇐0.1)
,” Phys. Rev. B
0556-2805, 63
(11
), pp. 113104
.34.
Shanks
, H. R.
, Sidles
, P. H.
, Maycock
, P. D.
, and Danielson
, G. C.
, 1963, “Thermal Conductivity of Silicon From 300 to 1400 Degrees K
,” Phys. Rev.
0031-899X, 130
(5
), pp. 1743
–1748
.35.
Abramson
, A. R.
, Kim
, W. C.
, Huxtable
, S. T.
, Yan
, H. Q.
, Wu
, Y. Y.
, Majumdar
, A.
, Tien
, C. L.
, and Yang
, P. D.
, 2004, “Fabrication and Characterization of a Nanowire/Polymer-Based Nanocomposite for a Prototype Thermoelectric Device
,” J. Microelectromech. Syst.
1057-7157, 13
(3
), pp. 505
–513
.36.
Stevens
, R. J.
, Smith
, A. N.
, and Norris
, P. M.
, 2005, “Measurement of Thermal Boundary Conductance of a Series of Metal-Dielectric Interfaces by the Transient Thermoreflectance Technique
,” ASME J. Heat Transfer
0022-1481, 127
(3
), pp. 315
–322
.Copyright © 2011
by American Society of Mechanical Engineers
You do not currently have access to this content.
