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Journal Articles

Hyperspectral Analysis of Silicon Nanowires Manufactured Through Metal-Assisted Chemical Etching

Pee-Yew Lee, Guo-Hao Lu, Yi-Hong Bai, Cheng-You Chen, Li-Yan Wu, Chun-Jen Weng, Hung Ji Huang, Yung-Sheng Lin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. February 2025, 147(2): 024501.
Paper No: MANU-24-1424
https://doi.org/10.1115/1.4066546
Published Online: October 14, 2024
View Article titled, Hyperspectral Analysis of Silicon Nanowires Manufactured Through Metal-Assisted Chemical Etching
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Topics: Chemical etching, Etching, Imaging, Metals, Nanowires, Reflection, Semiconductor wafers, Silicon, Wavelength, Resonance
Journal Articles

Effects of Bubbles on Manufacturing Gold Dendrites and Silicon Nanowires Through the Fluoride-Assisted Galvanic Replacement Reaction

Pee-Yew Lee, Hung Ji Huang, Tsung-Shine Ko, Ying-Lun Hung, Li-Yan Wu, Jia-Jun Fan, Yung-Sheng Lin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. November 2023, 145(11): 114501.
Paper No: MANU-23-1284
https://doi.org/10.1115/1.4062878
Published Online: July 21, 2023
View Article titled, Effects of Bubbles on Manufacturing Gold Dendrites and Silicon Nanowires Through the Fluoride-Assisted Galvanic Replacement Reaction
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Topics: Bubbles, Manufacturing, Metals, Nanowires, Silicon, Vacuum, Semiconductor wafers, Chemical etching, Etching
Journal Articles

Bubble Effects on Manufacturing of Silicon Nanowires by Metal-Assisted Chemical Etching

Pee-Yew Lee, Chun-Jen Weng, Hung Ji Huang, Li-Yan Wu, Guo-Hao Lu, Chao-Feng Liu, Cheng-You Chen, Ting-Yu Li, Yung-Sheng Lin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. September 2023, 145(9): 094501.
Paper No: MANU-23-1086
https://doi.org/10.1115/1.4062392
Published Online: May 9, 2023
View Article titled, Bubble Effects on Manufacturing of Silicon Nanowires by Metal-Assisted Chemical Etching
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Topics: Bubbles, Chemical etching, Etching, Hydrogen, Metals, Nanowires, Semiconductor wafers, Manufacturing, Silicon
Journal Articles

Precision Silicon Exfoliation Tool Design

Martin J. Ward, Dipankar Behera, Michael A. Cullinan
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. February 2023, 145(2): 024501.
Paper No: MANU-22-1105
https://doi.org/10.1115/1.4055320
Published Online: September 27, 2022
View Article titled, Precision Silicon Exfoliation Tool Design
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Topics: Design, Metrology, Semiconductor wafers, Silicon, Stress, Surface roughness, Errors, Nickel, Film thickness, Engineering prototypes
Journal Articles

Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon

Jiqiang Wang, Yanquan Geng, Zihan Li, Yongda Yan, Xichun Luo, Pengfei Fan
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. April 2022, 144(4): 041013.
Paper No: MANU-21-1127
https://doi.org/10.1115/1.4052356
Published Online: October 19, 2021
View Article titled, Study on the Vertical Ultrasonic Vibration-Assisted Nanomachining Process on Single-Crystal Silicon
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Topics: Crystals, Damage, Machining, Nanochannels, Silicon, Vibration, Stress
Journal Articles

Sustainable Fabrication of Glass Nanostructures Using Infrared Transparent Mold Assisted by CO 2 Laser Scanning Irradiation

Mohd Zairulnizam Bin Mohd Zawawi, Taekyung Kim, Myungki Jung, Jaehun Im, Shinill Kang
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. December 2018, 140(12): 121005.
Paper No: MANU-18-1268
https://doi.org/10.1115/1.4041181
Published Online: September 21, 2018
View Article titled, Sustainable Fabrication of Glass Nanostructures Using Infrared Transparent Mold Assisted by CO 2 Laser Scanning Irradiation
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Topics: Carbon dioxide lasers, Glass, Silicon, Irradiation (Radiation exposure), Manufacturing, Lasers
Journal Articles

Performance of Diamond and Silicon Carbide Wheels on Grinding of Bioceramic Material Under Minimum Quantity Lubrication Condition

P. Suya Prem Anand, N. Arunachalam, L. Vijayaraghavan
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. December 2017, 139(12): 121019.
Paper No: MANU-17-1235
https://doi.org/10.1115/1.4037940
Published Online: November 2, 2017
View Article titled, Performance of Diamond and Silicon Carbide Wheels on Grinding of Bioceramic Material Under Minimum Quantity Lubrication Condition
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Topics: Diamonds, Grinding, Grinding wheels, Wheels, Silicon, Fluids, Lubrication
Journal Articles

A Molecular Dynamics Simulation Study of Material Removal Mechanisms in Vibration Assisted Nano Impact-Machining by Loose Abrasives

Sagil James, Murali Sundaram
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. August 2017, 139(8): 081014.
Paper No: MANU-16-1452
https://doi.org/10.1115/1.4036559
Published Online: May 11, 2017
View Article titled, A Molecular Dynamics Simulation Study of Material Removal Mechanisms in Vibration Assisted Nano Impact-Machining by Loose Abrasives
Open the PDF for A Molecular Dynamics Simulation Study of Material Removal Mechanisms in Vibration Assisted Nano Impact-Machining by Loose Abrasives in another window
Topics: Abrasives, Borosilicate glasses, Heat resistant glass, Kinetic energy, Machining, Nanoparticles, Nanoscale phenomena, Silicon, Simulation, Vibration
Journal Articles

Residual Stress Distribution in Silicon Wafers Machined by Rotational Grinding

Ping Zhou, Ying Yan, Ning Huang, Ziguang Wang, Renke Kang, Dongming Guo
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. August 2017, 139(8): 081012.
Paper No: MANU-16-1608
https://doi.org/10.1115/1.4036125
Published Online: May 10, 2017
View Article titled, Residual Stress Distribution in Silicon Wafers Machined by Rotational Grinding
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Topics: Deformation, Diamonds, Grinding, Semiconductor wafers, Stress, Wheels, Stress concentration, Damage, Silicon
Journal Articles

Tool Load Sensitivity Against Multidimensional Process Influences in Microblanking of Copper Foils With Silicon Punches

Sven Hildering, Markus Michalski, Ulf Engel, Marion Merklein
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. September 2016, 138(9): 091004.
Paper No: MANU-15-1570
https://doi.org/10.1115/1.4033522
Published Online: June 20, 2016
View Article titled, Tool Load Sensitivity Against Multidimensional Process Influences in Microblanking of Copper Foils With Silicon Punches
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Topics: Copper foil, Cutting, Errors, Finite element model, Silicon, Stress, Tension, Wear, Fracture (Materials), Blanking (Metalworking)
Journal Articles

Deposition of a Silicon Carbide Reinforced Metal Matrix Composite (P25) Layer Using CO 2 Laser

Mum Wai Yip, Stuart Barnes, Ahmed Aly Diaa Mohmmed Sarhan
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. June 2015, 137(3): 031010.
Paper No: MANU-14-1349
https://doi.org/10.1115/1.4029831
Published Online: June 1, 2015
View Article titled, Deposition of a Silicon Carbide Reinforced Metal Matrix Composite (P25) Layer Using CO 2 Laser
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Topics: Iron, Lasers, Particulate matter, Porosity, Carbon dioxide lasers, Microhardness, Silicon
Journal Articles

Modeling of Material Removal Rate in Vibration Assisted Nano Impact-Machining by Loose Abrasives

Sagil James, Murali M. Sundaram
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. April 2015, 137(2): 021008.
Paper No: MANU-14-1284
https://doi.org/10.1115/1.4028199
Published Online: April 1, 2015
View Article titled, Modeling of Material Removal Rate in Vibration Assisted Nano Impact-Machining by Loose Abrasives
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Topics: Abrasives, Machining, Modeling, Vibration, Particulate matter, Silicon, Borosilicate glasses, Heat resistant glass, Brittleness, Atomic force microscopy
Journal Articles

A Theoretical Assessment of Surface Defect Machining and Hot Machining of Nanocrystalline Silicon Carbide

Saurav Goel, Waleed Bin Rashid, Xichun Luo, Anupam Agrawal, V. K. Jain
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. April 2014, 136(2): 021015.
Paper No: MANU-12-1239
https://doi.org/10.1115/1.4026297
Published Online: February 10, 2014
View Article titled, A Theoretical Assessment of Surface Defect Machining and Hot Machining of Nanocrystalline Silicon Carbide
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Topics: Cutting, Machining, Molecular dynamics simulation, Silicon, Stress, Cutting tools, Temperature
Journal Articles

Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma

X. Zhao, Y. C. Shin
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. December 2013, 135(6): 061015.
Paper No: MANU-13-1193
https://doi.org/10.1115/1.4025805
Published Online: November 18, 2013
View Article titled, Ablation Dynamics of Silicon by Femtosecond Laser and the Role of Early Plasma
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Topics: Ablation (Vaporization technology), Dynamics (Mechanics), Electrons, Lasers, Plasmas (Ionized gases), Silicon, Absorption, Fluence (Radiation measurement), Temperature
Journal Articles

Laser Bending of Silicon Sheet: Absorption Factor and Mechanisms

Weixing Xu, L. C. Zhang, Xuyue Wang
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research-Article
J. Manuf. Sci. Eng. December 2013, 135(6): 061005.
Paper No: MANU-13-1128
https://doi.org/10.1115/1.4025579
Published Online: November 5, 2013
View Article titled, Laser Bending of Silicon Sheet: Absorption Factor and Mechanisms
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Topics: Absorption, Lasers, Silicon, Temperature, Laser beams, Thermocouples, Thin films
Journal Articles

Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics

Raul E. Riveros, Hitomi Yamaguchi, Taylor Boggs, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Utako Takagi, Yuichiro Ezoe, Kensuke Ishizu, Teppei Moriyama
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2012, 134(5): 051001.
https://doi.org/10.1115/1.4006967
Published Online: August 20, 2012
View Article titled, Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-Ray Optics
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Topics: Annealing, Finishing, Hydrogen, Microelectromechanical systems, Mirrors, Optics, Silicon, Surface roughness, X-ray optics, X-rays
Journal Articles

Femtosecond Laser-Induced Simultaneous Surface Texturing and Crystallization of a-Si:H Thin Film: Absorption and Crystallinity

Hongliang Wang, Panjawat Kongsuwan, Gen Satoh, Y. Lawrence Yao
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2012, 134(3): 031006.
https://doi.org/10.1115/1.4006548
Published Online: May 7, 2012
View Article titled, Femtosecond Laser-Induced Simultaneous Surface Texturing and Crystallization of a-Si:H Thin Film: Absorption and Crystallinity
Open the PDF for Femtosecond Laser-Induced Simultaneous Surface Texturing and Crystallization of a-Si:H Thin Film: Absorption and Crystallinity in another window
Topics: Absorption, Crystallization, Lasers, Water, Spectra (Spectroscopy), Thin films, Silicon
Journal Articles

Time-Resolved Experimental Study of Silicon Carbide Ablation by Infrared Nanosecond Laser Pulses

Yibo Gao, Yun Zhou, Benxin Wu, Sha Tao, Ronald L. Jacobsen, Bill Goodman
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. April 2011, 133(2): 021006.
https://doi.org/10.1115/1.4003618
Published Online: March 11, 2011
View Article titled, Time-Resolved Experimental Study of Silicon Carbide Ablation by Infrared Nanosecond Laser Pulses
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Topics: Ablation (Vaporization technology), Laser ablation, Lasers, Silicon, Plasmas (Ionized gases), Micromachining
Journal Articles

Integrated Two-Photon Polymerization With Nanoimprinting for Direct Digital Nanomanufacturing

Wande Zhang, Li-Hsin Han, Shaochen Chen
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Special Issue On Nanomanufacturing
J. Manuf. Sci. Eng. June 2010, 132(3): 030907.
https://doi.org/10.1115/1.4001661
Published Online: May 26, 2010
View Article titled, Integrated Two-Photon Polymerization With Nanoimprinting for Direct Digital Nanomanufacturing
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Topics: Glass, Lasers, Manufacturing, Nanomanufacturing, Photons, Polymerization, Polymers, Nanostructures , Silicon, Wavelength
Journal Articles

Development of Plasma Nanomanufacturing Workcell

King Wai Chiu Lai, Jeffri J. Narendra, Ning Xi, Jiangbo Zhang, Timothy A. Grotjohn, Jes Asmussen
Journal: Journal of Manufacturing Science and Engineering
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. June 2010, 132(3): 031003.
https://doi.org/10.1115/1.4001719
Published Online: April 29, 2010
View Article titled, Development of Plasma Nanomanufacturing Workcell
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Topics: Atomic force microscopy, Etching, Nanomanufacturing, Plasmas (Ionized gases), Probes, Silicon, Photoresists, Diamonds