The form deviations of tooth flanks of spur and helical gears obtained by using a laser holographic interferometer are compared with the results of the conventional measuring method using a contacting stylus. The objective tooth flank which has a rough finish compared with optical parts is irradiated with a laser beam in a large incident angle to obtain the reflected ray from it. Image patterns of the interference fringes for tooth flanks with various types of form deviation are obtained, and they are transformed to the form deviations from the target tooth flank form. The algorithm of this transformation is shown: the brightness information of the image of the interference fringe on the CRT is converted to the amplitude of form deviation defined on the plane of action of the gear according to the phase difference of light beam by using the phase stepping method. A partial measuring procedure for helical gears is proposed which achieves the same level of accuracy as the conventional method using a stylus.

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