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Zheng Yuan Li
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Proceedings Papers

A Real Time Cost Effective Geometry Calibration Method for Isocenter Tracking of a Rotating Gantry Using Optical Vision Sensors

Zheng Yuan Li, Sungsoo Ryo, Hyuk Jin Lee, Ja Choon Koo
Proc. ASME. ISPS2016, ASME 2016 Conference on Information Storage and Processing Systems, V001T07A008, June 20–21, 2016
Paper No: ISPS2016-9559
https://doi.org/10.1115/ISPS2016-9559
View Paper titled, A Real Time Cost Effective Geometry Calibration Method for Isocenter Tracking of a Rotating Gantry Using Optical Vision Sensors
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Topics: Calibration, Geometry, Sensors, Deformation, Lasers, Complementary metal oxide semiconductors, Finite element analysis, Imaging, Manufacturing, Optical instruments
Proceedings Papers

Optical Head Alignment Method Using Serial Manipulators for Maskless Lithography System

Jong Yoon Choi, Sae Whan Park, Yong Seok Inh, Zheng Yuan Li, Ja Choon Koo
Proc. ASME. ISPS2014, 2014 Conference on Information Storage and Processing Systems, V001T07A004, June 23–24, 2014
Paper No: ISPS2014-6927
https://doi.org/10.1115/ISPS2014-6927
View Paper titled, Optical Head Alignment Method Using Serial Manipulators for Maskless Lithography System
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Topics: Manipulators, Maskless lithography, Algorithms, Errors, Kinematics, Design, Lithography, Reflectance, Cathode ray oscilloscopes, Electron beams
Proceedings Papers

Parallel Micro Manipulator for Effective Optical Spot Array Alignment

Zheng Yuan Li, Sae Whan Park, Yong Seok Inh, Jong Yoon Choi, Ja Choon Koo
Proc. ASME. ISPS2014, 2014 Conference on Information Storage and Processing Systems, V001T07A005, June 23–24, 2014
Paper No: ISPS2014-6929
https://doi.org/10.1115/ISPS2014-6929
View Paper titled, Parallel Micro Manipulator for Effective Optical Spot Array Alignment
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Topics: Genetic algorithms, Manipulators, Maskless lithography